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Wafer Dicing technologies

Blade / saw dicing Stealth dicing

√Used for > 100um thick wafers

×Large Kerf (cutwidth)

×Chipping

×Debris/post clean

×Higher water consumption

×High consumable parts (blades) cost

×Not suitable for thin wafers

√Used for thin wafers < 100um

√Dry process/ Enviro . Friendly

√No debris

×IP protected process

×Not suitable for complex devices

Wafer processing

fs laser dicing laser ablation laser + saw

Full cut with Laser:only fs solution for thin wafers

√Hybrid technology offers high speed no mechanical forces;√no cracking or chipping

√low kerf width

√Low HAZ

√High throug hput

√Excellent yield, better accuracy

√Hybridof laser + saw

√Dry process, low material waste

√Low HAZ

√No delamination

√High through put

√Excellent yield, high accuracy

√Dry process, low material waste

Femtosec laser advantage

Multiple wavelengths  available

High power, high energy= high throughput

High Reliability, good lifetime

OEM solutions provider

Manufacturing capacity

Unmatched quality systems

Global support structure, dedicated support available

Global support structure, dedicated support available

Collaborative approach

Industry leader in manufacturing of high power

industrial laser systems

Strong industrial links

Strong partnerships with leading application laboratories

脈動科技有限公司
地址:北京市海淀區中關村333號樓二層201室;上海市長寧區茅臺路868號光華大廈南樓1009室;西安市碑林區南二環西段太白路立交西北未來城 3# 樓2404 室;四川省成都市成華區錦繡大道4599號榮盛香榭蘭庭;深圳市南山區桃園路1號西海明珠大廈E棟1207室,
電話:010-62565117  傳真:010-62565117-803
郵箱:[email protected]
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